http://telecom.esa.int/telecom/www/object/printfriendly.cfm?fobjectid=29462
Carbon Nanotube Turfs
The SEM image below shows part of an array of 20 micron carbon nanotube turfs that are used as a thermal switch in a MEMS device. The vertically aligned turfs are grown on a sol-gel substrate which is patterned using the photolithography equipment in the cleanroom. The process allows for precise control of the position and size of the nanotube turf, creating arrays of turfs as small as 5 microns to be grown. http://www.cmr.wsu.edu/cleanroom/applications/carbon_nanotube_turfs
MEMS and Microstructures in Aerospace Applications: Chapter 9. Microsystems In Spacecraft Thermal Control
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